MAG – vacuum coating machine devoted to deposition of oxides filmes , namely of titanium, aluminum, zirconium, zinc on surfaces of complex shape and for antiviral and antibacterial coatings by plasma-deposited metal/metal oxides Ag , Cu , TiO2, TiOx + metal , with oxygen flow control by feedback of plasma emission spectroscopy.

MAG possesses precise control of the crystalline phase of TiO2 (anatase and rutile). MAG includes:

• deposition of oxide films based on magnetron sputtering
• subsequent heat treatment in vacuum on the basis of a vacuum heat treatment furnace with 3 heating zones, intended for transfer from one to another polymorphic modifications (rutile, brookite and anatase) of titanium dioxide (titanium oxide (IV), TiO2) during vacuum heating
• water-air cooler.

Sputtering of metal oxides using plasma magnetron sputtering is achieved by combining dynamic reactive magnetron sputtering with control of gas partial pressure. Controlling the partial pressure of the reactive gas makes it possible to control the process in the transition region between the elementary and the poisoned states of the target.
The range of automated regulation of power sources provides a greater degree of control over the properties of the film.The system has the ability to simultaneously control several reactive sputtering processes and the partial pressure of a reactive gas.
Direct optical monitoring is performed in a discontinuous mode using an arbitrarily selected position of the rotating substrate.
Components of the complex should form a single technological process, the separate parts of which are inextricably interconnected, mutually agreed on technical parameters and performance, integrated into a single infrastructure.

MAG ensures stable deposition of oxide coatings: titanium, aluminum, zirconium, zinc and a given stoichiometry of the chemical compound composition on the surface of a complex geometric shape with full automatic control of the partial pressure of reactive gas:

• the total thickness of the coatings is 100-1000 nm;
• A full cycle of coating with a duration of 1-4 hours;
• a typical growth rate of the coating thickness is 0.1-0.7 micron / hour.
• nominal temperature of the central zone: 700 ° C, maximum temperature: 1200 ° C
• pumping system of 85 l / s, combining an oil-free primary pump of 6 m3 / h, a turbomolecular pump of 85 l / s and a dual-band pressure sensor. This system provides efficient pumping, P <5. 10-6 mbar.
• pumping cycle control
• heat cycle control with the help of 3 controllers, independent temperature with programmable time and heating temperature.
• cooling system